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Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

: Gu-Stoppel, S.; Janes, J.; Quenzer, H.J.; Hofmann, U.; Benecke, W.


Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XIII : 3 - 6 February 2014, San Francisco, California, United States
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 8977)
ISBN: 978-0-8194-9890-8
Paper 897706, 8 pp.
Conference "MOEMS and Miniaturized Systems" <13, 2014, San Francisco/Calif.>
Conference Paper
Fraunhofer ISIT ()

This paper presents designs and fabrication process of two single-axis PZT micromirrors with 1 mm diameter and 1.4 mm × 4 mm apertures, whose frequencies are 60 kHz and 17 kHz, respectively. These micromirrors achieve large optical scan angles of about 40° driven by 10 V rectangular pulses and show high Q-factors of more than 1000. The investigation on the long-term stability of a PZT driven micromirror has detected more than 100 Billion cycles. The combined results of experimental diagnostics and FEM analyses give rise to new designs iteratively leading to a larger deflection and appropriate frequencies, which are currently fabricated.