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Capabilities of electron beam evaporation for the deposition of compounds

 
: Schiller, S.; Neumann, M.; Hötzsch, G.

Bakish, R. ; Bakish Materials Corp., Englewood/N.J.:
Fourth International Conference on Vacuum Web Coating 1990. Proceedings : Reno, Nevada, October 31-November 2, 1990
Englewood, NJ, 1990
ISBN: 0-939997-09-6
pp.138-158
International Conference on Vacuum Web Coating <4, 1990, Reno/Nev.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30137.html