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Progress in high-rate electron beam evaporation of oxides for web coating

 
: Schiller, S.; Neumann, M.; Morgner, H.; Schiller, N.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 36th Annual Technical Conference 1993. Proceedings : April 25-30, 1993, Dallas, TX
Albuquerque: SVC, 1993
ISBN: 1-87806-812-1
pp.278-292
Society of Vacuum Coaters (Annual Technical Conference) <36, 1993, Dallas/Tex.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30135.html