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Pulsed magnetron sputter technology

 

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Surface and coatings technology 61 (1993), No.1-3, pp.331-337
ISSN: 0257-8972
International Conference on Metallurgical Coatings and Thin Films <20, 1993, San Diego/Calif.>
English
Journal Article, Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30134.html