Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Comparison between electron beam evaporation and high-rate sputtering with the plasmatron

 
: Schiller, S.; Heisig, U.; Goedicke, K.

IPAT 1977, Conference "Ion Plating & Allied Techniques". Proceedings : Edinburgh, June 1977
Edinburgh: Audio Litho, 1977
pp.157-176
Conference "Ion Plating and Allied Techniques" (IPAT) <1977, Edinburgh>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30126.html