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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Comparison between electron beam evaporation and high-rate sputtering with the plasmatron
| IPAT 1977, Conference "Ion Plating & Allied Techniques". Proceedings : Edinburgh, June 1977
Edinburgh: Audio Litho, 1977
pp.157-176 |
| Conference "Ion Plating and Allied Techniques" (IPAT) <1977, Edinburgh> |
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| English |
| Conference Paper |
| Fraunhofer FEP () |