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Al2O3 layers on plastic films ways to get high deposition rates

 
: Schiller, S.; Neumann, M.; Morgner, H.; Schiller, N.

Bakish, R. ; Bakish Materials Corp., Englewood/N.J.:
8th International Conference on Vacuum Web Coating : Las Vegas, Nevada, November 6 - 8, 1994
Englewood/N.J., 1994
ISBN: 0-939997-17-7
pp.173-190
International Conference on Vacuum Web Coating <8, 1994, Las Vegas>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30115.html