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2013
Conference Paper
Titel
Reliability comparison of pure ZrO2 and Al- doped ZrO2 MIM capacitors
Abstract
The integration of passive devices on chip plays an important role in system miniaturization and enabling of future applications. In order to keep pace with the device scaling and reduction of chip area integrated MIM capacitors of enhanced capacitance density are required for supply buffering, decoupling or signal filtering.
Author(s)