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2013
Journal Article
Titel
Local temperature determination in power loaded surface acoustic wave structures using Raman spectroscopy
Abstract
The temperature at the surface of surface acoustic wave (SAW) devices is a critical parameter not only for their design but also for the understanding of failure mechanisms like acoustomigration. We report about a contactless measurement method using Raman spectroscopy for the temperature determination on interdigital transducers (IDTs) of SAW test structures. A power load of up to 3.5 W/mm2 at an operating frequency of 130 MHz was used to generate travelling Rayleigh waves on a lithium niobate 128° YX substrate. Here, the local temperature on the surface between the finger electrodes of the IDT increases by 60 K. In addition to Raman spectroscopy, the reversible shift of the resonance frequency of the SAW test structure was used to determine and calibrate the local temperature of external loaded samples. These experiments show good agreement with temperatures obtained by Raman spectroscopy based evaluations.