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Optimized scribing of TCO layers on glass by selective femtosecond laser ablation

: Krause, S.; Miclea, P.-T.; Schweizer, S.; Seifert, G.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society; Institute of Electrical and Electronics Engineers -IEEE-, Power & Energy Society -PES-:
39th IEEE Photovoltaic Specialists Conference, PVSC 2013 : Tampa, Florida, USA, 16.06.2013-21.06.2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4799-3299-3
Photovoltaic Specialists Conference (PVSC) <39, 2013, Tampa/Fla.>
Conference Paper
Fraunhofer CSP ()

Narrow trenches have been scribed into transparent conductive oxide (TCO) films on glass by laser ablation using nano- and femtosecond pulses of 1 m wavelength. A detailed analysis of the obtained ablation craters and trenches shows that this processing, known as P1 scribes in the production of thin film solar cells, can be considerably optimized utilizing 'cold' ablation: using femtosecond pulses, the P1-scribe can be done with almost rectangular cross-section profiles achieving the required electrical separation already at widths below 10 m, without thermal and mechanical stresses in the substrate or adjacent material. Analogous preliminary results for P2-scribes indicate that this technique allows reducing the total scribe region (optically-inactive zone) to widths below 50 m.