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Dual Magnetron Sputter System as dc cathode - an investigation of its electrical properties
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2002
Conference Paper
Titel
Dual Magnetron Sputter System as dc cathode - an investigation of its electrical properties
Author(s)
Krause, U.
Rettich, T.
Wiedemuth, P.
Hauptwerk
European Workshop on Pulsed Plasma Surface Technologies, PPST Europe '02. CD-ROM
Konferenz
European Workshop on Pulsed Plasma Surface Technologies (PPST Europe) 2002
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP