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Design, fabrication and testing of silicon-integrated Li-ion secondary micro batteries with side-by-side electrodes

 
: Hoeppner, K.; Ferch, M.; Eisenreich, M.; Marquardt, K.; Hahn, R.; MacKowiak, P.; Mukhopadhyay, B.; Ngo, H.-D.; Gernhardt, R.; Toepper, M.; Lang, K.-D.

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Fulltext (PDF; )

Beeby, S.:
PowerMEMS 2013, 13th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications. Conference Proceedings : London, 3rd - 6th December 2013
London: IOP, 2013 (Journal of physics. Conference series 476.2013)
Art. 012086, 6 pp.
International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications (PowerMEMS) <13, 2013, London>
English
Conference Paper, Electronic Publication
Fraunhofer IZM ()

Abstract
This paper reports the design, fabrication, and testing of silicon-integrated lithium ion secondary micro batteries with a side-by-side electrode setup. Two cavities separated by a narrow silicon spacer served as a containment for the electrodes and were etched into <110>-Si by wet chemical etching using aqueous KOH solution. The etched silicon battery containment was passivated by a stress-compensated layer of SiO 2/Si3N4. Ti/Pt-current collectors were applied by E-beam evaporation and lift-off structuring. A volumetric dispenser served to fill the cavities with slurries of the active materials-lithium cobalt oxide (LiCoO2) as the anode and graphite as the cathode material. Encapsulation, electrolyte filling, and electrochemical characterisation of the finished cells took place in an Ar-filled glove box. The fabricated batteries have shown a rate capability of up to 5C and a linear capacity loss rate of <1 % per cycle over 30 full-cycles. Battery containments with different cavity and spacer widths have been fabricated.

: http://publica.fraunhofer.de/documents/N-300734.html