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Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

: Gu-Stoppel, S.; Janes, J.; Quenzer, H.J.; Hofmann, U.; Kaden, D.; Wagner, B.; Benecke, W.


Institute of Electrical and Electronics Engineers -IEEE-:
Transducers 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems : Eurosensors XXVII; Barcelona, Catalonia (Spain); 16 - 20 June 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5981-8
ISBN: 978-1-4673-5983-2
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <17, 2013, Barcelona>
Conference Paper
Fraunhofer ISIT ()

This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm 2 apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz) and the opt·D product achieves up to 20.7°·mm driven by a unipolar rectangular pulse of 10 V. The combination of high frequency operation and the high driving force of the piezoelectric actuators leads to a very short reaction time. Furthermore, by combining the two adjacent torsion modes of the micromirrors circle laser beam trajectories can be realized.