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Reactive magnetron sputter technologies for precision optical coatings

 
: Frach, P.; Bartzsch, H.; Gloess, D.; Taeschner, K.; Liebig, J.-S.

:

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Art.ThB.7
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
English
Conference Paper
Fraunhofer FEP ()

Abstract
Highly productive technologies for precison optics will be presented. Film properties of multi-layer and gradient coatings as well as results regarding reproducibility, climatic stability and LIDT will be shown.

: http://publica.fraunhofer.de/documents/N-300651.html