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A novel topology for pulse generators in magnetron sputter systems

: Güldner, H.; Wolf, G.-K.; Eckholz, F.; Schrade, F.; Winkler, T.; Handt, K.; Junghähnel, M.

National Center of Research and Technological Development -CENIDET-, Mexico:
VII IEEE International Power Electronics Congress 2000. Technical proceedings : Acapulco, Mexico, October 15 - 19, 2000
Piscataway, NJ: IEEE, 2000
ISBN: 0-7803-6489-9
International Power Electronics Congress <7, 2000, Acapulco>
Conference Paper
Fraunhofer FEP ()

Pulse generators in magnetron sputter systems have to generate an electromagnetic field between the magnetrons under different operating conditions. Most of the electric parameters like output power, pulse width and the switching frequency have to be adjustable in a wide range. Another changing parameter is the load behaviour which varies from high impedance to Zener characteristic during every switching period. Starting from a comparison of current topologies this paper presents a novel pulse generator for Pulsed Plasma Surface Technologies (PPST). It is demonstrated that the combination of different basic topologies results in an improved efficiency of the sputter process.