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Post-deposition treatment of IBS coatings for UV applications

: Bischoff, M.; Nowitzki, T.; Voß, O.; Wilbrandt, S.; Stenzel, O.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper PMB.10
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
Conference Paper
Fraunhofer IOF ()

IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters.