English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Reaktive sputtering in roll-to-roll coating machines using rotatable magnetrons
Details
Full
Export
Statistics
Options
2014
Conference Paper
Titel
Reaktive sputtering in roll-to-roll coating machines using rotatable magnetrons
Author(s)
Fahland, Matthias
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Vogt, Tobias
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Dimer, Martin
Von Ardenne
Khvostikova, Olga
Von Ardenne
Hauptwerk
ICCG 2014, 10th International Conference on Coatings on Glass and Plastics
Konferenz
International Conference on Coatings on Glass and Plastics (ICCG) 2014
Language
English
google-scholar
View Details
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
Tags
reactive sputtering
roll-to-roll coating
permeation barrier
aluminium oxide