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Hybrid assembly of micro scanner arrays with large aperture and their system integration

 
: Sandner, Thilo; Wildenhain, Michael; Schwarzenberg, Markus; Schenk, Harald

Gessner, Thomas (Ed.) ; Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2013. CD-ROM : Amsterdam, The Netherlands, 13 - 14 March 2013, 7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Berlin: VDE-Verlag, 2013
ISBN: 978-3-8007-3490-0
8 pp.
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <7, 2013, Amsterdam>
European Commission EC
FP7-ICT; 248623; TACO
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-298170.html