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Superposition of mid-frequency and high power impulse magnetron sputtering
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2014
Conference Paper
Titel
Superposition of mid-frequency and high power impulse magnetron sputtering
Author(s)
Gerdes, H.
Sittinger, V.
Bandorf, R.
Lenck, O.
Vergöhl, M.
Bräuer, G.
Hauptwerk
5th International Conference on Power Electronics for Plasma Engineering 2014. Conference Proceedings
Konferenz
International Conference on Power Electronics for Plasma Engineering (PE2) 2014
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST