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2013
Conference Paper
Titel
Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Abstract
This paper will report on the deposition and characterization of piezoelectric AlN and AlXSc1-XN layers. A special focus is on the characterization regarding the mechanical stress in the films. Potential applications of the films are in ultrasonic microscopy, energy harvesting and SAW/BAW filters. To demonstrate the potential in ultrasonic applications, the pulse echo method was used.
Author(s)