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Wafer-level hybrid integration of complex micro-optical modules

: Dannberg, Peter; Wippermann, Frank; Brückner, Andreas; Matthes, Andre; Schreiber, Peter; Bräuer, Andreas

Postprint (1 MByte; PDF; )

Micromachines 5 (2014), No.2, pp.325-340
ISSN: 2072-666X
Journal Article, Electronic Publication
Fraunhofer IOF ()
fabrication techniques; lithography; microlens; polymer; UV curing; hybrid integration

A series of technological steps concentrating around photolithography and UV polymer on glass replication in a mask-aligner that allow for the cost-effective generation of rather complex micro-optical systems on the wafer level are discussed. In this approach, optical functional surfaces are aligned to each other and stacked on top of each other at a desired axial distance. They can consist of lenses, achromatic doublets, regular or chirped lens arrays, diffractive elements, apertures, filter structures, reflecting layers, polarizers, etc. The suitability of the separated modules in certain imaging and non-imaging applications will be shown.