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Micro-scanning mirrors for high-power laser applications in laser surgery

 
: Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald

:

Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems XIII : 3 - 6 February 2014, San Francisco, California, United States
Bellingham, WA: SPIE, 2014 (Proceedings of SPIE 8977)
ISBN: 978-0-8194-9890-8
Paper 897705
Conference "MOEMS and Miniaturized Systems" <13, 2014, San Francisco/Calif.>
English
Conference Paper
Fraunhofer IPMS ()
quasistatic scanning micromirror; large aperture; two-dimensional; high power application

Abstract
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser-surgical instrument for neurosurgery to cut skull tissue. An electrostatic driven 2D-raster scanning mirror with 5x7.1mm aperture is used for dynamic steering of a ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micro mirror with 6 mm x 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W average laser power.

: http://publica.fraunhofer.de/documents/N-294198.html