English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Metrological assessment of the coefficient of friction of various types of silica using the motor current during ILD-CMP
Details
Full
Export
Statistics
Options
2004
Conference Paper
Titel
Metrological assessment of the coefficient of friction of various types of silica using the motor current during ILD-CMP
Author(s)
Jacobsen, H.
Stachowiak, E.
Zwicker, G.
Lortz, W.
Brandes, R.
Hauptwerk
Advances in chemical-mechanical polishing
Konferenz
Symposium K: "Advances in Chemical-Mechanical Polishing" 2004
Materials Research Society (Spring Meeting) 2004
Language
English
google-scholar
View Details
Fraunhofer-Institut für Siliziumtechnologie ISIT