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Nano-diamond based spheres for radio frequency electromechanical resonators

: Lebedev, V.; Iankov, D.; Heidrich, N.; Zürbig, V.; Wild, C.; Cimalla, V.; Ambacher, O.


Journal of micromechanics and microengineering 24 (2014), No.4, Art. 045015, 7 pp.
ISSN: 0960-1317
ISSN: 1361-6439
Journal Article
Fraunhofer IAF ()
nanodiamond; MEMS; resonator; transducer

In this work, we report on the electro-mechanical studies of high-Q spherical oscillators designed to operate in radio-frequency circuits. Resonating composite spheres, consisting of a silicon core and a thick nanodiamond shell, were studied by laser vibrometry in order to obtain mechanical quality factors and identify the resonant frequencies and eigenmodes of the system. Finite element method simulations were used to analyze and confirm the experimental data. Additionally, reflection/transmission measurements were carried out on capacitively coupled spheres in order to evaluate the electrical parameters of the system. The main aim of these investigations was to evaluate the potential of diamond-based spherical resonators to be used in modern communication devices.