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Thick film PZT transducer arrays for particle manipulation

: Qiu, Yongqiang; Wang, Han; Bolhovitins, Aleksandrs; Démoré, Christine; Cochran, Sandy; Gebhardt, Sylvia; Schönecker, Andreas


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society:
IEEE International Ultrasonics Symposium, IUS 2013. Vol.3 : Prague, Czech Republic, 21 - 25 July 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-5686-2
ISBN: 978-1-4673-5685-5
ISBN: 978-1-4673-5684-8
International Ultrasonics Symposium (IUS) <2013, Prague>
Conference Paper
Fraunhofer IKTS ()
2-D array; particle manipulation; screen-printing; thick film

This paper reports the fabrication and evaluation of a two-dimensional thick film PZT ultrasonic transducer array operating at about 7.5 MHz for particle manipulation. All layers on the array are screen-printed and sintered on an Al2O3 substrate without further processes or patterning. The measured dielectric constant of the PZT is 2250 ± 100, and the dielectric loss is 0.09 ± 0.005 at 10 kHz. Finite element analysis has been used to predict the behaviour of the array and impedance spectroscopy and laser vibrometry have been used to characterise its performance. The measured deflection of a single activate element is on the order of tens of nanometres with 20 Vpp input. Particle manipulation experiments have been performed by coupling the thick film array to a capillary containing polystyrene microspheres in water.