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Few micrometers wide, perfectly isolating scribes in transparent conductive oxide layers prepared by femtosecond laser processing

: Krause, S.; Miclea, P.-T.; Steudel, F.; Schweizer, S.; Seifert, G.


Journal of renewable and sustainable energy 6 (2014), No.1, Art. 011402, 8 pp.
ISSN: 1941-7012
Photovoltaic Technical Conference <4, 2013, Aix en Provence>
Journal Article, Conference Paper
Fraunhofer CSP ()

Laser ablation for the preparation of isolating trenches in transparent conductive oxide films on glass has been studied comparing the use of nano- and femtosecond pulses at approximately 1 mu m wavelength. By a detailed analysis of the obtained ablation craters and grooves, it can be shown that this processing, which is called P1 scribing in the field of thin film photovoltaics, can be considerably optimized with so-called "cold" ablation: Using femtosecond pulses, the P1 scribe can be done with almost rectangular cross section profiles, achieving the required electrical separation already at widths well below 10 mu m, without thermal and mechanical stresses in the substrate or adjacent material. Analogous preliminary results for P2 scribes indicate that this technique allows reducing the total scribe region (optically inactive zone) to widths below 50 mu m.