Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Defect inspection and detection using optical image projection

Presentation held at China Semiconductor Technology International Conference (CSTIC), March 17-18, 2013, Shanghai, China
 
: Xu, D.; Li, S.; Wang, X.; Erdmann, A.

2013, 21 Folien
China Semiconductor Technology International Conference (CSTIC) <2013, Shanghai>
English
Presentation
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-283919.html