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Biocompatibility evaluation of MEMS packaging materials for implantable devices

: Baum, M.; Haubold, M.; Besser, J.; Wiemer, M.; Gessner, T.


Biomedizinische Technik 58 (2013), Supplement 1, 2 pp.
ISSN: 0013-5585
ISSN: 1862-278X
Deutsche Gesellschaft für Biomedizinische Technik (DGBMT Jahrestagung) <47, 2013, Graz>
Journal Article, Conference Paper
Fraunhofer ENAS ()

Within this paper we will describe the investigations of biocompatibility testing of certain materials used for MEMS packaging and MEMS fabrication. Next to these typical semiconductor materials also nano patterned surfaces were evaluated regarding their influence to cell growth and their potential for implantable devices. Both topics were necessarily expected to be relevant for in-vivo patient monitoring applications.