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Evaluation of laser-based active thermography for the inspection of optoelectronical devices

: Boehnel, Michael; Hassler, Ulf; Kollorz, Eva; Holub, Wolfgang; Mohr, Stephan

Maldague, X.P.V.:
16th Edition of the International Symposium on Applied Electromagnetics and Mechanics, International Conference and of the 7th IWASPNDE Workshop 2013. Abstract book : July 31st - August 2nd, 2013, Québec City, Canada
Les Eboulements: É. du CAO, 2013
ISBN: 978-2-9809199-3-0
International Symposium on Applied Electromagnetics and Mechanics (ISEM) <16, 2013, Québec>
International Workshop on Advances in Signal Processing for Non Destructive Evaluation of Materials (IWASPNDE) <7, 2013, Québec>
Conference Paper
Fraunhofer IIS ()
Thermografie; industrielle BV; Filterung; Defekterkennung; Bildverarbeitung; aktive Thermografie

An active microscopic thermographic setup is proposed for high-resolution inspection of optoelectronical devices. A laser is used for thermal excitation of the test object. A setup is proposed, which in principle could be used for inline inspection of the chips. A data processing scheme is proposed for interpretation of the images. Experimental results of the imaging as well as of the processing methods are given for some test samples.