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Recent results of optical coatings deposited on the EOSS coater

: Rademacher, D.; Bruns, S.; Vergöhl, M.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper ThB.5
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
Conference Paper
Fraunhofer IST ()

In 2011 an optical interference manufacturing platform called EOSS was presented by the Fraunhofer IST. This platform employs cylindrical cathodes in a special sputter-up configuration. The latest results obtained at this coater are presented.