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Properties of reactive sputtered alumina-silica mixtures

: Bruns, S.; Rademacher, D.; Vergöhl, M.; Weiss, P.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper WA.3
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
Conference Paper
Fraunhofer IST ()

Standard antireflective coatings applied to hard substrates suffer from poor abrasion resistance. The properties of the low refractive index material silica can be modified by mixing with alumina by reactive magnetron sputtering on heated sapphire.