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Picosecond Laser Micromachining in the context of MEMS/NEMS applications
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2013
Conference Paper
Titel
Picosecond Laser Micromachining in the context of MEMS/NEMS applications
Author(s)
Enderlein, Tom
Helke, Christian
Hiller, Karla
Nestler, J.
Schueller, M.
Geidel, S.
Otto, Thomas
Geßner, Thomas
Hauptwerk
Smart Systems Integration 2013. CD-ROM
Konferenz
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS