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Degree of integration enhancement of membrane actuators in LOCs utilizing laser technology
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2013
Conference Paper
Titel
Degree of integration enhancement of membrane actuators in LOCs utilizing laser technology
Author(s)
Geidel, S.
Enderlein, Tom
Nestler, J.
Morschhauser, Andreas
Otto, Thomas
Geßner, Thomas
Hauptwerk
MikroSystemTechnik Kongress 2013. CD-ROM
Konferenz
MikroSystemTechnik Kongress 2013
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS