English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Plasma activated bonding of the heterogeneous material combinations LiTaO3/Si and poly-Si/SiO2
Details
Full
Export
Statistics
Options
2012
Conference Paper
Titel
Plasma activated bonding of the heterogeneous material combinations LiTaO3/Si and poly-Si/SiO2
Author(s)
Wünsch, Dirk
Braeuer, J.
Wiemer, Maik
Geßner, Thomas
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
google-scholar
View Details
Fraunhofer-Institut für Elektronische Nanosysteme ENAS