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Optimization of MEMS/NEMS for reliable resonance frequencies
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2013
Conference Paper
Titel
Optimization of MEMS/NEMS for reliable resonance frequencies
Author(s)
Stöckel, Chris
Hofmann, K.
Forke, Roman
Billep, Detlef
Geßner, Thomas
Hauptwerk
Smart Systems Integration 2013. CD-ROM
Konferenz
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS