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Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

: Krimi, S.; Klier, J.; Herrmann, M.; Jonuscheit, J.; Beigang, R.


IEEE Microwave Theory and Techniques Society; Fraunhofer-Institut für Physikalische Messtechnik -IPM-, Freiburg/Brsg.:
38th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2013 : Mainz, Germany, 1 - 6 September 2013
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4673-4717-4 (online)
ISBN: 978-1-4673-4715-0 (print)
2 pp.
International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) <38, 2013, Mainz>
Conference Paper
Fraunhofer IPM ()
terahertz wave spectra; multilayers; genetic algorithms; thickness measurement; time-domain analysis; spectroscopy

We present a novel approach to determine the individual layer thickness in a dielectric multilayer sample using pulsed terahertz spectroscopy in reflection geometry. In a first step, the optical parameters of each layer have to be determined. Based on these parameters, we simulate the reflected THz-pulse from the multilayer system and compare it to the measurement. A genetic algorithm is used to determine the best agreement between simulation and measurement by varying the thickness of each layer.