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Soluble powders as precursors for TiO2 thin films

: Löbmann, P.


Journal of Sol-Gel Science and Technology 33 (2005), No.3, pp.275-282
ISSN: 0928-0707
ISSN: 1573-4846
Journal Article
Fraunhofer ISC ()
Titandioxid; TiO2; Film; Beschichtung; Dünnschicht; Schichten; sol-gel; Ausgangsmaterial

Amorphous precursor powders have proven to be highly advantageous for the sol-gel processing of TiO2 thin films. Oxide yield, density, solubility, and thermal degradation of powders prepared under various conditions were determined; the thermoanalytical data could be assigned to the oxidative decomposition of different organic constituents. Certain powders are suitable for the preparation of alcohol-based sols, whereas also aqueous coating solutions can be prepared from others. Thin films prepared from both systems show excellent adhesion and optical properties when deposited on borosilicate glass substrates.