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Molecular Weiss domain polarization in piezoceramics to diaphragm, cantilever and channel construction in low-temperature-cofired ceramics for micro-fluidic applications

: Khanna, P.K.; Ahmad, S.; Grimme, R.


Materials chemistry and physics 89 (2005), No.1, pp.56-63
ISSN: 0254-0584
Journal Article
Fraunhofer IPA ()
Low Temperature Cofired Ceramics (LTCC); Piezoelektrik; multilayer; Multilayer-Keramik; crystal symmetry; Microfluidics; Keramik; Mikrofluidik

This paper presents the efforts made to study the process of comminution to previous Weiss domain polarization and phase transition in piezoceramics together with the versatility of low-temperature-cofired ceramics-based devices and components for their ready adoption for typical applications in the area of micro-fluidics. A conceptual micro-fluidic module has been presented and few unit entities necessary for its realization have been described. The purpose of these entities is to position the sensors and actuators by using piezoelectric materials. Investigations are performed to make useful constructions like diaphragms and cantilevers for laying the sensing elements, cavities for burying the electronic chip devices, and channels for fluid transportation. In order to realize these constructions, the basic step involves machining of circular, straight line, rectangular and square-shaped structure in the green ceramic tapes followed by lamination and firing with post-machining in some cases. The diaphragm and cavity includes one or more un-machined layer stacked together with several machined layers with rectangular or square slits. The cantilever is an extension of the diaphragm creation process with inclusion of a post-machining step. The channel essentially consists of a machined green ceramic layer sandwiched between an un-machined and a partially machined layer. The fabrication for all the above constructions has been exemplified and the details have been discussed.