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Method for scattered light measurement, involves determining detection direction by polar scatter angle measured for normal of sample surface and azimuthal scatter angle measured inwards plane of incidence in plane of sample surface
 
: Trost, Marcus; Schröder, Sven; Herffurth, Tobias

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Frontpage ()

DE 102012106322 B3: 20120713
German
Patent, Electronic Publication
Fraunhofer IOF ()

Abstract
The method involves illuminating a sample (1) with a measuring light beam (2) in a plane of incidence (6) at an incidence angle (theta-i), where scattered light (4) of the sample is measured in a detection direction. The detection direction is determined by a polar scatter angle (theta-s) measured for normal (n) of a sample surface (5) and an azimuthal scatter angle (phi-s) measured inwards plane of incidence in a plane of the sample surface. The scatter light measurement is performed in detection direction such that polar scatter angle of detection direction is held in specific angle range.

: http://publica.fraunhofer.de/documents/N-270992.html