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Ultraschallwandler zur Anregung und/oder zur Detektion von Ultraschall unterschiedler Frequenzen

Ultrasonic transducer for exciting and/or detecting ultrasound of various frequencies
: Heuer, Henning; Herzog, Thomas

Frontpage ()

DE 102012003495 A1: 20120224
Patent, Electronic Publication
Fraunhofer IZFP, Institutsteil Dresden ( IKTS-MD) ()

The transducer has sensor elements (3a, 3b) excitable for sound emission and/or readable for sound detection. The sensor elements include piezoelectric layer elements (2a, 2b) isolated on a planar substrate (1) i.e. silicon wafer, where thicknesses (da, db) and/or materials of the piezoelectric layer elements are different from each other. The piezoelectric layer elements are arranged at a distance from each other in a discrete array arrangement e.g. one-dimensional series arrangement. The substrate is made of silicon, quartz and/or sapphire. An independent claim is also included for a method for manufacturing an ultrasound transducer.