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Enhanced mechanical performance of AlN/nanodiamond micro-resonators

: Heidrich, N.; Iankov, D.; Hees, J.; Pletschen, W.; Sah, R.E.; Kirste, L.; Zuerbig, V.; Nebel, C.; Ambacher, O.; Lebedev, V.


Journal of micromechanics and microengineering 23 (2013), No.12, Art. 125017, 6 pp.
ISSN: 0960-1317
ISSN: 1361-6439
Journal Article
Fraunhofer IAF ()

Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III-V semiconductor-based components in prospective radio frequency communication devices. Due to their unique material properties, microstructures combining doped nano-crystalline diamond (NCD) and AlN thin films are promising for piezo-actuated microsystems in order to increase operating frequencies. In this work, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1-20 MHz to deduce their mechanical properties. Enhancements in the structural properties of an AlN piezo-actuator united with an advanced elasticity of nano-diamond electrode lead to superior mechanical parameters of the resulting unimorphs. These allow for the fabrication of flexural resonant microsystems with a potential to extend the operating frequencies well above 1 GHz.