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Micro-scanning mirrors for high-power laser applications in laser surgery

 
: Sandner, T.; Kimme, S.; Grasshoff, T.; Todt, U.; Graf, A.; Tulea, C.; Lenenbach, A.; Schenk, H.

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Institute of Electrical and Electronics Engineers -IEEE-; IEEE Photonics Society:
International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013. Proceedings : 18-22 August 2013, Kanazawa, Japan
Piscataway, NJ: IEEE, 2013
ISBN: 978-1-4799-1512-5
pp.83-84
International Conference on Optical MEMS and Nanophotonics (OMN) <2013, Kanazawa>
European Commission EC
FP7-ICT; 248623; TACO
English
Conference Paper
Fraunhofer IPMS ()
Fraunhofer ILT ()

Abstract
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.

: http://publica.fraunhofer.de/documents/N-268991.html