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Two-step plasma texturing process for industrial solar cell manufacturing

: Seiffe, J.; Bremen, B.; Rappl, S.; Hofmann, M.; Rentsch, J.

Fulltext urn:nbn:de:0011-n-2669417 (362 KByte PDF)
MD5 Fingerprint: dcdd2ea7a3336c5f05fe8656f8602ea5
Created on: 7.12.2013

Mine, A. ; European Commission:
28th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2013. Proceedings. DVD-ROM : 30 September to 04 October 2013, Paris, France
München: WIP-Renewable Energies, 2013
ISBN: 3-936338-33-7
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <28, 2013, Paris>
Conference Paper, Electronic Publication
Fraunhofer ISE ()
PV Produktionstechnologie und Qualitätssicherung; Silicium-Photovoltaik; Oberflächen: Konditionierung; Passivierung; Lichteinfang; Pilotherstellung von industrienahen Solarzellen; Produktionsanlagen und Prozessentwicklung; Texturisation; Properties; Cell

This study describes the development of a two-step SF6/O2 texturing process using an inline industrial-type plasma system with combined microwave and radiofrequency excitation. It is shown that efficient texturing of polished (100), (111) and multicrystalline surfaces is possible. Multicrystalline silicon solar cells are processed proving an average efficiency gain of 0.2 % absolute compared to standard acidic texturing. With an improved sur­face passivation even a gain of 0.4 % absolute is achieved.