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Preparation of UV-VIS high index coating materials with PIAD using xenon as working gas

: Wilbrandt, Steffen; Stenzel, Olaf; Schlegel, Ralph; Kaiser, Norbert


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper WC.6
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
Conference Paper
Fraunhofer IOF ()

Xenon assistance in PIAD coating deposition processes offers highest densification when applied to suitable materials. We present experimental results on HfO2 and Ta2O5 layers pursuing applications in UV coating technology.