Options
2004
Journal Article
Titel
Metalloxidgassensor-Array für die Qualifizierung der Luftgüte
Alternative
Metal oxide gas sensor array for air quality monitoring
Abstract
Es wird ein neuartiges 'Single-Chip'-Metalloxidgassensorarray zur Qualifizierung der Luftgüte vorgestellt. Das Sensorarray besteht aus vier unterschiedlich gassensitiven Sensorelementen (Cr(1,8)Ti(0,2)O(3+z), ZnO, SnO2, WO3, V2O5), welche monolithisch auf einem Sensorchip integriert sind. Es wurde sowohl eine Variante auf Bulk-Silizium als auch eine mikromechanische Variante mit deutlich reduziertem Heizleistungsverbrauch entwickelt. Die mikromechanische Ausführung reduziert den Heizleistungsverbrauch von 1,6 W auf 0,26 W bei einer Arbeitstemperatur von. 350 Grad C. Labor- und Langzeitmessungen in anwendungsrelevanten Szenarien zeigen die Eignung als Luftgütesensor. Two novel silicon-based sensor arrays for on-line air quality monitoring are described, the first one based on films deposited onto bulk silicon wafers and the second one a novel micromachined device for low power consumption. The micromachined version reduces the power consumption from 1.6 W to 0.26 W at 350 deg C working temperature. The sensing elements (Cr(1 ,8)Ti(0,2)O(3+z), ZnO, SnO2, WO3, V2O5) examined in the arrays include four different metal oxides deposited by thin film technologies. The measured responses in lab and application tests provide patterns which correlate with the air quality and are thus appropriate for an on-line air quality monitoring.
;
Two novel silicon-based sensor arrays for on-line air quality monitoring are described, the first one based on films deposited onto bulk silicon wafers and the second one a novel micromachined device for low power consumption. The micromachined version reduces the power consumption from 1.6 W to 0.26 W at 350 degreesC working temperature. The sensing elements (Cr1.8Ti0.2O3+z, ZnO, SnO2, WO3, V2O5) examined in the arrays include four different metal oxides deposited by thin film technologies. The measured responses in lab and application tests provide patterns which correlate with the air quality and are thus appropriate for an on-line air quality monitoring.