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Protected and enhanced aluminum mirrors for the VUV

: Wilbrandt, Steffen; Stenzel, Olaf; Nakamura, Hiroshi; Kaiser, Norbert


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM : 16 - 21 June 2013, Whistler, British Columbia, Canada
Washington, DC: OSA, 2013
ISBN: 978-1-55752-970-1
Paper FC.6
Topical Meeting "Optical Interference Coatings" (OIC) <2013, Whistler>
Conference Paper
Fraunhofer IOF ()

Aluminum layers protected with fluoride coatings have been deposited and characterized with respect to their suitability as VUV mirrors. Particularly protection with Aluminum fluoride results in superior VUV reflection properties.