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Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)

Presentation held at 39th International Conference on Micro and Nano Engineering, 16.-19.09.2013, London
 
: Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.

:
presentation urn:nbn:de:0011-n-2649313 (706 KByte PDF)
MD5 Fingerprint: 53d435c1e6c244aec3b768e259f9f34a
Created on: 6.11.2013


2013, 19 Folien
International Conference on Micro and Nano Engineering (MNE) <39, 2013, London>
English
Presentation, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-264931.html