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Low-power micromachined structures for gas sensors with improved robustness

 

Peeters, E. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachined devices and components VI : 18 - 19 September 2000, Santa Clara, USA
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4176)
ISBN: 0-8194-3832-4
pp.253-263
Conference "Micromachined Devices and Components" <2000, Santa Clara/Calif.>
English
Conference Paper
Fraunhofer IPM ()

: http://publica.fraunhofer.de/documents/N-26483.html