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Simulation and design optimization of transparent heaters for spectroscopic micro cells

 
: Völlm, H.; Herrmann, J.; Maier, R.; Feili, D.; Häublein, V.; Ryssel, H.; Seidel, H.

:

Schmid, U. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Smart sensors, actuators and MEMS VI. Vol.2 : 24 - 26 April 2013, Grenoble, France
Bellingham, WA: SPIE, 2013 (Proceedings of SPIE 8763)
ISBN: 978-0-8194-9560-0
Paper 87632C
Conference "Smart Sensors, Actuators and MEMS" <6, 2013, Grenoble>
English
Conference Paper
Fraunhofer IISB ()

Abstract
For several applications, micro cells with a uniform temperature profile and at least one optical port are required. One example for those cells is the physics package of a chip-scale-atomic-clock. It is necessary that the micro chambers are heated homogeneously to 353 K using a low energy consumption heater. In this work transparent heating structures are investigated to achieve this goal. First an analytical approach is used to describe the behavior of thermal energy dissipation of the heating structures. Then different approaches of possible heater structures are simulated to find the optimal basic configuration. Furthermore, this configuration is optimized to obtain a uniform temperature distribution in the whole cell.

: http://publica.fraunhofer.de/documents/N-264441.html