Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings

 
: Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M.

:

Surface and coatings technology 127 (2000), No.2-3, pp.224-232
ISSN: 0257-8972
International Conference on Metallurgical Coatings and Thin Films <26, 1999, San Diego/Calif.>
English
Conference Paper, Journal Article
Fraunhofer IST ()
DLC-Schicht; metal DLC; sputter deposition; substrate heating; film structure; friction; wear; coating adhesion

Abstract
Metal containing diamond-like carbon (Me-DLC) coatings were prepared by magnetron sputter deposition using tungsten, tungsten carbide, niobium and titanium as target materials. An essential parameter for the process characterization is the target voltage. The substrate heating during the film growth depends on the target material. For the tungsten target, the contribution of energetic neutrals to the heat flux is quite high. From the viewpoint of resistance to abrasive wear, the best properties were found for W-DLC. Nb-DLC coatings have an intermediate wear rate but offer the lowest friction coefficients and a high performance under adhesive wear loading. All Me-DLC coatings investigated in this study exhibit clearly higher wear rates than metal-free DLC films prepared by a radio frequency glow discharge technique. Metallic intermediate layers allow the preparation of coatings with a very good adhesion.

: http://publica.fraunhofer.de/documents/N-2638.html