Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Roll-to-roll technology for transparent high barrier films

 
: Schiller, N.; Fahlteich, J.; Fahland, M.; Schönberger, W.

Association of Industrial Metallizers, Coaters and Laminators -AIMCAL-:
Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 22nd International Vacuum Web Coating Conference 2008. Vol.2
Red Hook, NY: Curran, 2008
ISBN: 978-1-60560-796-2
pp.1020-1058
Association of Industrial Metallizers, Coaters and Laminators (Fall Technical Conference) <2008, Myrtle Beach/SC>
English
Conference Paper
Fraunhofer FEP ()

Abstract
A novel concept for the all-in-vacuum, roll-to-roll deposition of multilayer barrier stacks has been presented. The basis of the concept is the in-line combination of magnetron sputtering and a magnetron PECVD-process. The magnetron PECVD process offers several benefits low working pressure of 0.5 Pa up to few Pa, thus allowing the in-line combination with sputtering process wide range of properties for SiO xC y layers high potential for large area processing by using dual magnetrons as power source high coating rates (> 400 nmm/min) Our basic concept allows an all-in-vacuum roll-to-roll deposition of multilayer barrier stacks. The process has been installed in a pilot-cale multi-chamber pilot roll to roll coater.

: http://publica.fraunhofer.de/documents/N-263335.html